The EMICON MC systems are qualified for most applications in plasma technology for analyzing the plasma, for optimizing the process, for plasma monitoring, for quality control and for process controlling. The turn-key EMICON MC systems come with all features necessary for monitoring common plasma processes and for communicating via analog and digital outputs with the application control.
The spectral range of 200-1100 nm of the spectrometer units of the
EMICON MC systems covers the complete UV-VIS-NIR range. The EMICON MC
system can be equipped with up to eight spectrometer channels with no
loss regarding speed of data acquisition and data transfer. The complete
data communication is managed by a single USB 2.0 line thus enabling
the system to carry out control tasks even with a notebook computer.
The EMICON software provides extensive new features especially for plasma monitoring, plasma analysis and process control: recipe manager, arithmetic of spectra, automatic, replay of saved data, scaling of response curve and much more.