EMICON MC SYSTEM
The EMICON MC systems are ideal plasma monitor systems for R&D and suitable for almost any application in plasma technology including plasma analysis, plasma monitoring, and process optimizationl.
APPLICATIONS
TECHNICAL DATA
| Spectrometer channel: | 1-8 |
| Spectral resolution: | 1.5 nm |
| Wavelength range: | 200 – 1100 nm |
| Signal resolution: | 16 Bit |
| Temporal resolution: | about 20 ms to minutes |
| Digital inputs and outputs: | TTL 5Volt (2/4) |
| Analog control outputs: | ± 10 Volt (4/8) |
| Connection: | USB 2.0 |
FEATURES
EMICON MC SYSTEM
The turnkey and modular configurable EMICON MC systems are equipped with all necessary features to observe, analyze and optimize typical process plasmas in scientific and industrial applications.
With a spectral range of 200-1100 nm, the spectrometer units of the EMICON MC system cover the UV-VIS-NIR range. The EMICON MC system can be equipped with up to eight spectrometer channels. The entire data transfer is handled via a USB interface, so that open and closed loop controls can be realized with a notebook. With the addition of the EMICON LC module, layer properties such as reflection, transmission, layer thickness or color can be measured simultaneously.
The EMICON software offers extensive functions for plasma monitoring, plasma analysis and process optimization: template manager, real-time data arithmetic, control algorithms, replay of stored measurement data and many more.