THE NEW SPECLINE 3 SOFTWARE IS RELEASED!
Check out the new design and features
with the free trial version
Our solutions for smart
plasma analysis and process control
Robust components with high light throughput
for all applications
EMICON SA SYSTEM
Stand-alone process control system
for production lines
Plasma monitoring and process control
made in Germany
Meet us in 2023
Meet the experts of PLASUS at the following conferences and exhibitions in 2023:
- 2023 International Forum of High-Density Plasma Coatings and Process Control, Taiwan
- HIPIMS Today 2023, Online
- Plasma Technology Conference 2023, Germany
- SVC TechCon 2023, USA
- 13th HIPIMS Conference 2023, Netherlands
- V2023 -…
The new SPECLINE 3 Software is released!
With the completely revised SPECLINE 3 software, PLASUS sets new standards in the analysis and identification of spectral data. The new SPECLINE 3 version features a completely new, modern and intuitive user interface. Convince yourself of the unique features of the new SPECLINE 3 and request the free trial version.
Plasma Monitoring and Process Control Systems made in Germany
PLASUS is a worldwide leading manufacturer of spectroscopic plasma monitor and process control systems for any kind of plasma processes in R&D and industry. Applications range from quality control of PECVD plasmas over active process control in reactive sputter processes and endpoint detection in etching applications to process control of atmospheric plasmas.