Products

EMICON SA SYSTEM

PROCESS CONTROL FOR PRODUCTION LINES

The EMICON SA systems are the first choice for comprehensive process control and quality assurance of plasma processes in production lines. With the unique acquisition and combination of all important process data in one system in real time, the EMICON systems are the worldwide benchmark for successful process control.

EMICON MC SYSTEM

PLASMA MONITORING AND PROCESS OPTIMIZATION

The EMICON MC systems are ideal plasma monitor systems for R&D and are suitable for almost any application in plasma technology for plasma analysis, plasma monitoring, process optimization, quality assurance and process control.

EMICON LC SYSTEM

THIN FILM CONTROL

The EMICON LC system is an ideal extension of the EMICON SA and EMICON MC systems for in-situ real-time monitoring of transmission, reflection, absorption, color or coating thickness on the workpiece during the plasma process.

EMICON HR SYSTEM

HIGH RESOLUTION PLASMA ANALYSIS

The EMICON HR system is a spectral high-resolution plasma monitor system and is particularly suitable for detailed spectral plasma analysis and for plasma monitoring as well as for quality assurance and process control.

OPTIC COMPONENTS

ROBUST AND LOW-MAINTANANCE SENSORS

The optical components are the link between the application process and the detection system: All PLASUS components are optimized to transmit maximum light intensity while maintaining flexibility and durability in industrial environments.