EMICON HR System

EMICON HR SYSTEM

The EMICON HR system is a spectral high-resolution plasma monitor system and is particularly suitable for detailed spectral plasma analysis and for plasma monitoring. With an almost 10 times better spectral resolution compared to the other models, the EMICON HR provides a much better spectral separation of adjacent atomic lines and the resolution of vibrational and rotational lines in molecular bands.

APPLICATIONS

  • Spectral analysis of plasma processes
  • Process monitoring and process optimisation
  • Monitoring of process stability
  • Endpoint detection in plasma etching processes
  • Detection and monitoring of plasma contamination

TECHNICAL DATA

Spectrometer channels:1
Spectral resolution:0.2 – 0.5 nm
Wavelength range:200 – 860 nm
Signal resolution:16 Bit
Temporal resolution:about 50 ms to minutes
Digitla inputs and outputs:TTL 5 Volt (4/4)
Analog outputs:± 10 Volt (4/8)
Connection:USB 2.0

FEATURES

Data acquisition with high-resolution broadband spectrometer
Real-time monitoring of plasma radiation
Plasma analysis and process monitoring
Replay of stored measurement data for process analysis
Process control with setpoint function
Digital und analog inputs and outputs for system integration
Convenient EMICON MC software for Windows

EMICON HR SYSTEM

With a spectral range of 200-860 nm, the single-channel EMICON HR system covers the important parts of the UV-VIS-NIR regions. With 10 times better spectral resolution compared to the other EMICON systems, the EMICON HR allows much better spectral separation of adjacent atomic lines and resolution of vibrational and rotational lines in molecular bands. Due to the compact design without moving parts and the data transfer via USB interface, the EMICON HR system can be easily transported and used at different applications.

The EMICON software offers extensive functions for spectrum evaluation, plasma analysis and plasma monitoring: real-time spectrum arithmetic, playback of stored measurement data, template manager and many more.