RSD 2023 – Reactive Sputter Deposition

Published

Visit us at RSD 2023 at IOM in Leipzig, Germany from 12 to 13 December 2023!

At the International Conference on Reactive Sputter Deposition RSD 2023 PLASUS will present its latest developments for process monitoring and process control of sputtering applications:

  • The EMICON SA System for sputter applications
  • The EMICON SA-HIPIMS System for HIPIMS processes
  • Combined in-situ process monitoring of plasma and layer
  • The new SPECLINE 3 software

The industrial exhibition will take place alongside the conference in the rooms of the Leipziger Kubus.

We are looking forward to meeting you at the RSD 2023 in Leipzig!