Our solutions for smart
plasma analysis and process control
Robust components with high light throughput
for all applications
Stand-alone process control system
for production lines
Plasma monitoring and process control
made in Germany
Plasma Monitoring and Process Control Systems made in Germany
PLASUS is a worldwide leading manufacturer of spectroscopic plasma monitor and process control systems for any kind of plasma processes in R&D and industry. Applications range from quality control of PECVD plasmas over active process control in reactive sputter processes and endpoint detection in etching applications to process control of atmospheric plasmas.
EMICON SA Process Control System for Production Lines
The EMICON SA systems are especially designed for process control and quality assurance in industrial plants and production lines. The integrated processor unit ensures stand-alone operation in 24/7 mode and easy integration of the EMICON SA system into the system conrol by e.g. LAN or fieldbus.