SPECLINE-Software

THE NEW SPECLINE 3 SOFTWARE IS RELEASED!

Check out the new design and features
with the free trial version

EMICON-Systems

EMICON SYSTEMS

Our solutions for smart
plasma analysis and process control

OPTIC-Components

OPTIC COMPONENTS

Robust components with high light throughput
for all applications

EMICON-SA-System

EMICON SA SYSTEM

Stand-alone process control system
for production lines

Company

COMPANY

Plasma monitoring and process control
made in Germany

Visit us at SVC TechCon 2022!

3. April 2022

At the SVC TechCon 2022 conference from April 30 to May 5, 2022 in Long Beach, CA, PLASUS will present its latest development for plasma monitoring and process control. Learn more in two presentations by our experts and at our exhibition booth #531.

The new SPECLINE 3 Software is released!

With the completely revised SPECLINE 3 software, PLASUS sets new standards in the analysis and identification of spectral data. The new SPECLINE 3 version features a completely new, modern and intuitive user interface. Convince yourself of the unique features of the new SPECLINE 3 and request the free trial version.

Plasma Monitoring and Process Control Systems made in Germany

PLASUS is a worldwide leading manufacturer of spectroscopic plasma monitor and process control systems for any kind of plasma processes in R&D and industry. Applications range from quality control of PECVD plasmas over active process control in reactive sputter processes and endpoint detection in etching applications to process control of atmospheric plasmas.

THE NEW SPECLINE 3 SOFTWARE IS RELEASED!

Check out the new design and features
with the free trial version

EMICON SYSTEMS

Our solutions for smart
plasma analysis and process control

OPTIC COMPONENTS

Robust components with high light throughput
for all applications

EMICON SA SYSTEM

Stand-alone process control system
for production lines

COMPANY

Plasma monitoring and process control
made in Germany

News

Visit us at SVC TechCon 2022!

Product Highlight

The new SPECLINE 3 Software is released!

About PLASUS

Plasma Monitoring and Process Control Systems made in Germany

THE NEW SPECLINE 3 SOFTWARE IS RELEASED!

Check out the new design and featureswith the free trial version

EMICON SYSTEMS

Our solutions for smartplasma analysis and process control

OPTIC COMPONENTS

Robust components with high light throughputfor all applications

EMICON SA SYSTEM

Stand-alone process control systemfor production lines

COMPANY

Plasma monitoring and process controlmade in Germany

News

Visit us at SVC TechCon 2022!

Product Highlight

The new SPECLINE 3 Software is released!

About PLASUS

Plasma Monitoring and Process Control Systems made in Germany

Check out the new design and features
with the free trial version

Our solutions for smart
plasma analysis and process control

Robust components with high light throughput
for all applications

Stand-alone process control system
for production lines

Plasma monitoring and process control
made in Germany