THE NEW SPECLINE 3 SOFTWARE IS RELEASED!
Check out the new design and features
with the free trial version
Our solutions for smart
plasma analysis and process control
Robust components with high light throughput
for all applications
EMICON SA SYSTEM
Stand-alone process control system
for production lines
Plasma monitoring and process control
made in Germany
EMICON LC System
The EMICON LC system is an ideal extension of the EMICON SA and EMICON MC systems for in-situ real-time monitoring of transmission, reflection, absorption, color or coating thickness on the workpiece during the plasma process. It can be integrated in the EMICON models SA and MC system as add-on module. The stand-alone version of the EMICON LC can be used for coating processes without plasma.
Plasma Monitoring and Process Control Systems made in Germany
PLASUS is a worldwide leading manufacturer of spectroscopic plasma monitor and process control systems for any kind of plasma processes in R&D and industry. Applications range from quality control of PECVD plasmas over active process control in reactive sputter processes and endpoint detection in etching applications to process control of atmospheric plasmas.