SPECLINE-Software

THE NEW SPECLINE 3 SOFTWARE IS RELEASED!

Check out the new design and features
with the free trial version

EMICON-Systems

EMICON SYSTEMS

Our solutions for smart
plasma analysis and process control

OPTIC-Components

OPTIC COMPONENTS

Robust components with high light throughput
for all applications

EMICON-SA-System

EMICON SA SYSTEM

Stand-alone process control system
for production lines

Company

COMPANY

Plasma monitoring and process control
made in Germany

The new SPECLINE 3 Software is released!

30. March 2022

With the completely revised SPECLINE 3 software, PLASUS sets new standards in the analysis and identification of spectral data. The new SPECLINE 3 version features a completely new, modern and intuitive user interface. Convince yourself of the unique features of the new SPECLINE 3 and request the free trial version.

EMICON LC System

The EMICON LC system is an ideal extension of the EMICON SA and EMICON MC systems for in-situ real-time monitoring of transmission, reflection, absorption, color or coating thickness on the workpiece during the plasma process. It can be integrated in the EMICON models SA and MC system as add-on module. The stand-alone version of the EMICON LC can be used for coating processes without plasma.

Plasma Monitoring and Process Control Systems made in Germany

PLASUS is a worldwide leading manufacturer of spectroscopic plasma monitor and process control systems for any kind of plasma processes in R&D and industry. Applications range from quality control of PECVD plasmas over active process control in reactive sputter processes and endpoint detection in etching applications to process control of atmospheric plasmas.

THE NEW SPECLINE 3 SOFTWARE IS RELEASED!

Check out the new design and features
with the free trial version

EMICON SYSTEMS

Our solutions for smart
plasma analysis and process control

OPTIC COMPONENTS

Robust components with high light throughput
for all applications

EMICON SA SYSTEM

Stand-alone process control system
for production lines

COMPANY

Plasma monitoring and process control
made in Germany

News

The new SPECLINE 3 Software is released!

Product Highlight

EMICON LC System

About PLASUS

Plasma Monitoring and Process Control Systems made in Germany

THE NEW SPECLINE 3 SOFTWARE IS RELEASED!

Check out the new design and featureswith the free trial version

EMICON SYSTEMS

Our solutions for smartplasma analysis and process control

OPTIC COMPONENTS

Robust components with high light throughputfor all applications

EMICON SA SYSTEM

Stand-alone process control systemfor production lines

COMPANY

Plasma monitoring and process controlmade in Germany

News

The new SPECLINE 3 Software is released!

Product Highlight

EMICON LC System

About PLASUS

Plasma Monitoring and Process Control Systems made in Germany

Check out the new design and features
with the free trial version

Our solutions for smart
plasma analysis and process control

Robust components with high light throughput
for all applications

Stand-alone process control system
for production lines

Plasma monitoring and process control
made in Germany